Sql-server – Size of the database and table while inserting and deleting in sql server 2005

Deleted my previous answer when I realised the trace shows parallelism.

With a big warning to test this very very thoroughly, you might alleviate the deadlocks by restricting MAXDOP and adding a UPDLOCK hint on Table1. I would also (as per @Aaron's suggestion) try EXISTS.

DELETE 
    d
FROM 
    Table1 d WITH (UPDLOCK)
INNER JOIN
    #deleteEntities de
ON  de.id = oeh.EntityId 
WHERE EXISTS
    (
    SELECT
        NULL
    FROM
        dbo.Table2 orc 
    INNER JOIN
        dbo.Table3 orr 
    ON  orr.id = orc.Table3Id
    INNER JOIN 
        dbo.Table4 oeh            
    ON  oeh.id = orr.Table4Id
    WHERE
        oeh.id = de.Table2Id
    ) OPTION (MAXDOP 1, RECOMPILE)

This would be the sledgehammer approach. It's likely you could eliminate the parallelism with appropriate indexing but can't advise on that unless we see an execution plan and or statistics.

@deleteEntities in the deadlock trace is a little "suspicious". You're passing in a single identifer but have this temporary table in there?. Optimiser is likely to be producing an execution plan that estimates 1 for this, so if it contains a variable number of rows I'd switch to temporary table and force recompile (as above).

Perhaps it would be worth looking into SNAPSHOT transaction isolation level to guarantee read consistency (either at the level of individual statements with READ_COMMITTED_SNAPSHOT or a whole transaction with ALLOW_SNAPSHOT_ISOLATION)?

This should allow the reader to have the consistent view of the database while it is transferring data to datacube, even though other transactions might be modifying the same data concurrently. Also note that according to MSDN: "when the cursors are opened under the snapshot isolation level locks are not taken, which can reduce blocking on the server."